MEMS NODAL CENTER

MEMS technology exploits the existing microelectronics infrastructure to create complex machines on a micrometer scale. Extensive applications for these devices exist in both commercial and industrial systems. Well-known components such as integrated silicon pressure sensors, accelerometers, and motion detectors have found use for several years in automotive and industrial applications. In MEMS network center, we have three licensed softwares viz., COMSOL MultiPhysics, IntelliSuite and Coventor which are highly useful to make various models of MEMS based devices and applications. They include application modes for modeling of electrostatics, structural mechanics, piezoelectricity, film damping and microfluidics.